![]() Theoretical analysis shows that the minimum measuring diameter can reach 0.19 μm, and the root mean square of the residuals is only 1.4 nm. Combining confocal microscopy with super-resolution image restoration significantly improves the lateral resolution of the NTEM image, yields a reasonable circle edge-setting criterion of 0.2408, and achieves precise pore edge detection. This method facilitates the online inspection of the pore size evolution during etching. ![]() (E.G.) pt.Liu, Dali Wang, Yun Qiu, Lirong Mao, Xinyue Zhao, WeiqianA confocal pore size measurement based on super-resolution image restoration is proposed to obtain a fast and accurate measurement for submicrometer pore size of nuclear track-etched membranes (NTEMs). The Nichols model was used in the determination of the constitutive equation of the porous migration velocity.
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